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A Comprehensive View On AMC Prevention

AMC is referred to as “Airborne Molecular Contaminants.” You are invited to gain insights into preventing and controlling AMC. This article will reveal to you all aspects of preventing and controlling AMC from the six major aspects of “classification, common sources, why companies pay so much attention to it, the potential impact that AMC may have, industries that are easily affected by AMC, and AMC prevention and control solutions”. WelcomeContact us to learn about the best AMC control solutions.

Contents

AMC Classification of Gaseous Molecular Pollutants

According to the definition of semiconductor, AMC can be roughly divided into four major items: MA (acid vapor), MB (alkali vapor), MC (condensation substance) and MD (doping substance), which may come from External environments such as automobile exhaust gas, atmospheric ozone, and surrounding factory emissions outside the dust room, or internal processes and materials such as chemical solvent volatilization and etching acid gas in the clean room. Since the sources are very wide and the pollutant items are diverse, how to effectively Controlling AMC has gradually become a major problem for semiconductor manufacturers. If interpreted broadly, the classification of AMC can include four types. These AMC types have an important impact in high-precision industries. To ensure product quality, special filtration and control strategies must be developed:

1. Organic AMC

Mainly contains volatile organic compounds (VOCs), such as toluene, benzene, acetone, etc. These substances are commonly found in industrial solvents, paints and cleaners. Case: During the semiconductor manufacturing process, organic solvents volatilized during photoresist coating will form AMC in the air, which may cause defects on the wafer surface. Therefore, manufacturers usually install special chemical screening programs in the photolithography area to absorb VOCs.

2. Inorganic AMC

Including acidic gases (such as sulfuric acid mist, hydrochloric acid), alkaline gases (such as ammonia), and oxidants (such as ozone). These gases often originate from industrial emissions or the use of cleanroom cleaners. Example: In a solar cell manufacturing plant, ammonia may be released from chemical processes. If not treated in time, ammonia will react with the battery surface, reducing product efficiency and stability.

3. Metal AMC

Metal vapors such as mercury and lead are common pollutants released during certain high-temperature operations or equipment wear. Case: During the production of LCD panels, certain metal impurities may adhere to the surface of the glass substrate, affecting the display effect. This is usually done through strict control of equipment materials and surface treatment techniques to reduce metal contamination.

4. Condensable gas

A gaseous compound that condenses into a thin film on a cooler surface, often when industrial solvents or engine oil evaporate. Case: In the manufacturing of optical lenses in the aerospace industry, condensed solvent films can seriously affect the light transmittance and clarity of the lenses. This type of pollution needs to be solved through strict control of the humidity and temperature of the production environment.

Common Sources of AMC Gaseous Molecular Pollutants

AMC微污染氣體的常見來源2
Common sources of gaseous molecular pollutants (AMC) can be mainly summarized into the following categories. Combining actual cases can better illustrate their impact and the following response methods. In addition, AMC comes from various sources, and special filtration, ventilation and monitoring methods are required for different sources to ensure production safety and environmental quality.

1. Industrial emissions

The exhaust gas emitted by factories during the production process is the main source of AMC, such as sulfur dioxide (SO₂), nitrogen oxides (NOₓ) and volatile organic compounds (VOCs). Case: In semiconductor manufacturing plants, acidic gases (such as hydrogen chloride) generated during chemical etching and cleaning processes can easily react with equipment in the clean room, causing corrosion damage. To this end, these factories will install acid brine gas filtration devices and replace filter media regularly.

2. Car emissions

Motor vehicle exhaust in cities contains a large number of pollutants, such as carbon monoxide (CO), VOCs and particulate matter (PM2.5). Case: In areas with high traffic density, AMC pollutes the air conditioning systems of adjacent buildings, thereby affecting indoor air quality. Modern office buildings often use high-efficiency air filtration systems to reduce outdoor pollutants from entering indoors.

3. Clean room operation and equipment maintenance

In clean rooms, lubricants or maintenance chemicals used on equipment can release trace amounts of gaseous pollutants. Case: In nano-wafer fabs, the aging of equipment sealing materials will release AMC (such as organosilicon compounds). These contaminants may be deposited on the wafer surface and affect the microscopic performance of the circuit. The factory reduces contamination by regularly monitoring indoor AMC concentrations and replacing equipment sealing materials.

4. Environmental ozone

High concentrations of ozone are common air pollutants in industrial areas and may react with volatile organic compounds to generate secondary pollution. Case: When solvents used in the printing industry come into contact with ozone, new pollutants will be generated, causing hidden dangers to workers’ health and production equipment. In this case, the risk can be significantly reduced through indoor ozone filtration technology.

Why Do Companies Pay So Much Attention to AMC Gaseous Molecular Pollutants?

為什麼企業如此重視AMC微污染氣體汙染物
Enterprises attach great importance to air molecular pollution (AMC) mainly because of its huge impact on product quality, equipment life and production efficiency. AMC pollutants, such as organic gases, acidic gases, etc., can cause corrosion or deposition in sensitive production environments and equipment, leading to product quality problems or equipment failure. Therefore, companies need to take effective control measures to ensure production efficiency and safety. The control and monitoring of AMC pollutants is the basis for ensuring high-tech manufacturing and high-quality products. Especially in the semiconductor, electronics and pharmaceutical industries, companies have adopted a variety of innovative technologies and solutions to reduce the impact of these pollutions.

1. Semiconductor industry

In semiconductor manufacturing, the impact of airborne molecular contaminants on wafers and equipment is critical. Gaseous pollutants such as fluoride and sulfide can form thin films on the surface of the wafer, affecting the performance of the wafer. To avoid the impact of these pollutants, semiconductor manufacturers use high-efficiency air filtration systems and AMC monitoring technology to track air quality in real time and ensure that the clean room environment meets strict production standards. Case 1: A semiconductor factory installed an AMC monitoring system in a clean room. Through automated monitoring, the system can instantly display the concentration of pollutants and guide the maintenance of the filtration system, reducing equipment failures and production losses.
空氣淨化系統與監測設備
Case 2: The molecular size of gaseous molecular contaminants (AMC; Airborne Molecular Contamination) is about 0.3-1.5nm. As the manufacturing process continues to shrink, the impact of AMC will gradually increase. For the 5nm process, only 5 to 17 gas molecules are needed to fill the line width and affect the yield. Moreover, the current transistor GAA structure is relatively fragile and is more sensitive to AMC. Even if the wafer is exposed to a low concentration of 4ppb AMC, it only takes 40 minutes to cause great damage to the circuit, and complete wafer production takes about 6 to 8 weeks. As the semiconductor process continues to advance and the semiconductor process continues to shrink, AMC is becoming increasingly important and related equipment will gradually increase. A 7nm process production line requires about 10 AMC equipment, 5nm requires about 15 units, and 3nm requires about 18 units. It can be seen from this that AMC’s importance.

2. Electronic product manufacturing

Air pollutants in the production of electronic products will also affect product quality and yield. For example, in LED manufacturing, gaseous pollutants in the air may affect the stability of the wafer, resulting in color difference or reduced lifespan. To this end, many companies have invested in introducing advanced air purification and monitoring technology to ensure the cleanliness of the production environment. Case: An LED manufacturing company used a high-performance air filtration solution in the production line, successfully reducing the concentration of AMC pollutants and ensuring product consistency and high yield.

3. Pharmaceutical industry

In the pharmaceutical industry, the presence of air pollutants may lead to cross-contamination in pharmaceutical production, thereby affecting the quality and safety of pharmaceuticals. Especially in the production process of vaccines and biological products, chemical pollutants in the air can cause products to fail to meet quality standards. Therefore, strictly controlling the concentration of AMC is key to business operations. Case: A pharmaceutical company significantly reduced the concentration of harmful substances in the air by installing a dedicated chemical screening program, thereby improving the stability and compliance of pharmaceutical production.

What Are The Potential Impacts That AMC Gaseous Molecular Pollutants May Cause?

AMC微汙染氣體可能造成的潛在影響是
The potential impact of gaseous molecular contaminants (AMC) on the environment and industrial production is far-reaching, especially in high-precision manufacturing. Chemical pollutants in the air, such as hydrogen chloride, hydrogen fluoride, sulfide, etc., can cause corrosion to equipment, affect product quality, and even lead to production shutdowns and expensive maintenance costs. Therefore, the potential impact of air molecular pollution on industrial production and the environment cannot be ignored. By adopting advanced monitoring and filtration technologies, companies can reduce the negative impact of AMC pollutants on equipment, production processes and product quality, ensuring the stability and quality of production. The following are several practical cases and application scenarios illustrating the potential impact of AMC contaminants:

1. Chemical air filtration

Remove harmful molecules in the air such as organic gases, acidic gases and volatile organic compounds (VOCs) through the use of specialized chemical screening processes. This screening process captures and breaks down gaseous contaminants, typically using activated carbon, alumina or modified materials. Case: In semiconductor production, in order to prevent fluoride and other corrosive chemicals from affecting equipment and wafer surfaces, manufacturers will install efficient chemical air screening programs in clean rooms to ensure that the AMC concentration in the air is maintained at a safe level. Filtration’s AMC prevention and control solution is a complete solution for effective filtration of AMC produced in various semiconductor productions.

2. High-performance air filtration solution

By optimizing the configuration of the screening program, energy consumption is reduced while filtration efficiency is improved. This solution is widely used in many high-tech manufacturing industries, especially in production environments where extremely clean air is required. Case 1: The high-performance air filtration system provided by Filter Energy is used in large data centers and high-end electronics manufacturing plants. These systems not only improve air quality but also significantly reduce energy consumption and equipment maintenance costs.

3. Air purification system and monitoring equipment

Using sophisticated air quality monitoring equipment combined with an advanced purification system, AMC pollutants in the air can be instantly monitored and removed. Case: In some pharmaceutical companies, especially in the pharmaceutical production process, air purification systems are used in conjunction with automated monitoring equipment to instantly detect the concentration of pollutants and adjust purification measures as needed to ensure that air quality meets strict industry standards.

Which Industries Are Easily Affected By AMC Gaseous Molecular Pollutants?

容易被 AMC微污染氣體汙染物影響的產業是
Gastric molecular contaminants (AMC) have potential negative impacts on multiple industries, especially in high-precision areas such as semiconductor manufacturing, pharmaceutical industries and clean room environments , the tiny presence of contaminants can cause serious production problems. What these industries have in common is that they all rely on strict control of air quality to ensure efficient production and high-quality products. By using specialized air purification and monitoring technologies, these industries can effectively reduce the negative impact of AMC on their production processes. Here are some real-world examples and application scenarios illustrating how these industries are affected by air molecular pollution:

1. Semiconductor industry

Semiconductor production requires extremely high environmental cleanliness. Gaseous pollutants in the air will be deposited on the surface of the wafer, causing the wafer to fail or short-circuit. For example, contaminants such as hydrogen chloride and ammonia may react with metal materials at high temperatures, causing corrosion on the wafer surface. Therefore, in the semiconductor manufacturing process, high-efficiency air filtration systems (such as high-efficiency activated carbon screening programs) are often used to remove these harmful molecules. The industry has actually started to prevent the impact of AMC on the yield rate of the semiconductor process very early, but in the past it only targeted large particulate matter; as the sophistication of the process increases, the current standards Becoming more stringent, AMC’s testing items have gradually expanded from simple acid and alkali substances in the past to organic substances, and the monitoring of organic species has also gradually expanded from the more than ten types that semiconductors paid attention to in the past to new and unknown ones. Organic species.

2. Pharmaceutical industry

In pharmaceutical manufacturing, the presence of AMC contaminants may lead to cross-contamination of pharmaceuticals or reduce the purity of pharmaceuticals. To prevent this risk, drug manufacturers use chemical screening programs to monitor the concentration of harmful molecules in the air and use specialized purification systems to remove these pollutants. For example, activated carbon screening programs and potassium permanganate filter materials are common choices.

3. Food processing industry

The food processing industry is also affected by AMC, especially during production, packaging and storage. If chemical pollutants such as volatile organic compounds (VOCs) are present in the air, they may affect the taste, smell and shelf life of food. In this case, the industry often uses advanced air purification equipment, such as VOC recovery systems and adsorption purification technology.

What Is The Solution For AMC Gaseous Molecular Pollutants?

AMC微污染氣體污染物的解決方案
Solutions to air molecular contamination (AMC) often rely on efficient filtration technology and air purification systems, especially in highly sensitive industries such as semiconductor, pharmaceutical and electronics manufacturing . Through these advanced solutions, companies can effectively control AMC pollutants and reduce their negative impact on the production environment, thereby ensuring product quality and reducing production costs. Here are some common solutions and their practical applications:

1. Chemical air filtration

Remove harmful molecules in the air such as organic gases, acidic gases and volatile organic compounds (VOCs) through the use of specialized chemical screening processes. This screening process captures and breaks down gaseous contaminants, typically using activated carbon, alumina or modified materials. Case: In semiconductor production, in order to prevent fluoride and other corrosive chemicals from affecting equipment and wafer surfaces, manufacturers will install efficient chemical air screening programs in clean rooms to ensure that the AMC concentration in the air is maintained at a safe level. Filtration’s AMC prevention and control solution is a complete solution for effective filtration of AMC produced in various semiconductor productions.

2. High-performance air filtration solution

By optimizing the configuration of the screening program, energy consumption is reduced while filtration efficiency is improved. This solution is widely used in many high-tech manufacturing industries, especially in production environments where extremely clean air is required. Case 1: The high-performance air filtration system provided by Filter Energy is used in large data centers and high-end electronics manufacturing plants. These systems not only improve air quality but also significantly reduce energy consumption and equipment maintenance costs.

3. Air purification system and monitoring equipment

Using sophisticated air quality monitoring equipment combined with an advanced purification system, AMC pollutants in the air can be instantly monitored and removed. Case: In some pharmaceutical companies, especially in the pharmaceutical production process, air purification systems are used in conjunction with automated monitoring equipment to instantly detect the concentration of pollutants and adjust purification measures as needed to ensure that air quality meets strict industry standards.

Why Choose Greenfiltec?

1. Go Clean, Think Green

With the development vision of becoming a “global green enterprise”, Greenfiltec continues to uphold the corporate spirit of “Go Clean, Think Green”. Greenfiltec’s chemical filter is made of renewable and recyclable materials and meets the requirements of green production. The materials used have been rigorously screened and tested to effectively filter pollutants while reducing negative impact on the environment. In addition, it can also be recycled, which reduces damage to the environment and is in line with the concept of sustainable development.

2.Must To Have

Faced with the irreversible trend of global development toward net-zero carbon emissions, Greenfiltec’s internalized environmental sustainability efforts have shifted from nice to have to must to have. First of all, in terms of product carbon reduction, filtration can be used to Environmental protection Modular filter is the main axis, and the detachable design of the product replaces the traditional fixed filter structure. Not only the frame can be reused, but also the filter with saturated adsorption efficiency can be replaced through a single layer. , effectively reducing customers’ AMC maintenance costs by 40%, and reducing filter waste by 60%; in addition, the low pressure loss design of the filter also effectively reduces the energy consumption of the fan during operation, helping customers reduce carbon emissions and upgrade!

Greenfiltec’s chemical filter can effectively protect product quality, while meeting the requirements of low-carbon environmental protection and achieving green production. In future development, we will continue to work on developing more environmentally friendly chemical filters and strive to achieve the goal of zero waste.